The end of the story: I bought a pre-programmed BIOS chip on e**y, the seller sent me 2 pre-programmed chips (main and spare) and also as an alternative, the main chip with the unlocked file from my last post. I tried at first this one and it worked!
So no idea, what was exactly my problem, maybe there were more than one, but finally it worked

Thank you for all support and for the unlock tool!
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